Zur Theorie auf selbsterregter Elektronenresonanz basierender Diagnostikmethoden für kapazitiv gekoppelte Niedertemperaturplasmen

Product Description

Although the basic mechanism of self-excited electron resonance in capacitively coupled low-temperature plasmas is understood, the industrially applied plasma diagnostic methods based on this principle currently still suffer from some weaknesses. Thus far, it has not been possible to account for the self-inductance effects that become increasingly important with rising electron densities, plasma reactor dimensions, and operating frequencies. Based on a fluid-dynamic plasma description, a spatially resolved model is developed that considers plasma and field dynamics for arbitrary configurations regarding reactor geometry, electron distribution, and nonlinear boundary layer characteristics with arbitrary capacitive energy coupling. This enables a better understanding of plasma system behavior, especially for the increasingly important regimes of high electron densities, large reactor dimensions, and high operating frequencies.